Issue
Total 55 articles [ 키워드: Thin Film ]
No. Article
51 Korean Journal of Chemical Engineering, 15 (6), pp.652-657 (1998)
A Study of Deposition Rate and characterization of BN Thin Films Prepared by CVD
Jin YG, Lee SY, Nam YW, et al.
52 Korean Journal of Chemical Engineering, 15 (3), pp.243-245 (1998)
Crystalline Structure of YSZ Thin Films Deposited on Si((111) Substrate by Chemical Vapor Deposition
Hwang SC, Lee HG, Shin HS
53 Korean Journal of Chemical Engineering, 14 (2), pp.136-140 (1997)
METALORGANIC CHEMICAL VAPOR DEPOSITION OF FERROELECTRIC Pb(ZrXTi1-X)O3 THIN FILMS
Chung CW, Kim D
54 Korean Journal of Chemical Engineering, 13 (5), pp.473-477 (1996)
PREPARATION AND CHARACTERIZATION OF TiO2 THIN FILMS BY PECVD ON Si SUBSTRATE
Lee IS, Kim JW, Youn CJ, et al.
55 Korean Journal of Chemical Engineering, 12 (1), pp.1-11 (1995)
CHEMICAL VAPOR DEPOSITION OF ALUMINUM FOR ULSI APPLICATIONS
Rhee SW
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