High Tc Y1-xYbxBa2Cu3O7-y films were prepared on SrTiO3(100) substrates by chemical vapor deposition method. Yb1Ba2Cu3O7-y films were obtained at higher oxygen partial pressure compared with Y1Ba2Cu3O7-y films at the same deposition temperature. Tc, o (R=0) decreased about 1.5K when Y was fully substituted with Yb. The c-axis lattice parameter of Y1-xYbxBa2Cu3O7-y films also decreased as the amount of Yb(x) increased.
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