Issue
Korean Journal of Chemical Engineering,
Vol.28, No.11, 2196-2201, 2011
Evaluation of pressure-temperature swing adsorption for sulfur hexafluoride (SF6) recovery from SF6 and N2 gas mixture
The separation/concentration of SF6, a strong greenhouse gas, of 1.3% in N2 was investigated using pressuretemperature swing adsorption (PTSA) with activated carbon. To screen an effective adsorbent to be used for PTSA, adsorption isotherms on the selected adsorbents were obtained. Among the studied adsorbents, AC-1, a coconut-shell based commercial activated carbon, showed the largest adsorption amount of 3.5mmol-SF6/g-carbon at 303.65 K and 3 atm and the highest selectivity among the adsorbents tested. Its adsorption isotherm was well fit into Langmuir-Freundlich model. Before feasibility test of PTSA, a series of experiments were performed to investigate the effect of operating parameters including adsorption pressure, feed flow rate, desorption temperature and evacuation time on the PTSA performance using the 3-step PTSA cycle (pressurization, adsorption and regeneration-recovery). As the adsorption pressure, desorption temperature and evacuation time were increased, respectively, purity and recovery increased. Increasing the feed flow rate resulted in low purity and recovery. The maximum purity of 19.5% and recovery of 50.1% were obtained with adsorption pressure of 2.5 atm, desorption temperature of 200 ℃ and evacuation of 1 hour.
[References]
  1. Langan J, Maroulis P, Ridgeway R, Solid State Technol., 39, 115, 1996
  2. Aitchison K, A Partnership for PFC Emissions Reductions, Semicon Southwest, 1998
  3. Mendicino L, PFC Technical, Semicon West, 1999
  4. Beu L, Brown PT, Electrochem. Soc. Proc., 99-8, 1, 1999
  5. http://www.grida.no/publications/other/ipcc%5Ftar/?src=/climate/ipcc_tar/wg1/248.htm.
  6. http://www.esrl.noaa.gov/gmd/dv/iadv/graph.php?code=MLO&program=hats&type=ts.
  7. Johnson AD, Entley WR, Maroulis PJ, Solid State Technol., 43, 103, 2000
  8. SEMATECH, Technology Transfer #96073156B-ENG, December, 31, 1997
  9. SEMATECH, Technology Transfer #97013229A-TR, February 28, 1997
  10. SEMATECH, Technology Transfer #98113600A-ENG, December, 21, 1998
  11. SEMATECH, Technology Transfer #98053508A-TR. June 2, 1998
  12. Toyoda M, Murase H, Inohara T, Naotsuka H, Kobayashi A,Takano K, Ohkuma K, IEEE., 3, 2156, 2000
  13. Yang RT, Gas Separation by Adsorption Processes, Butterworths, Boston, 1987
  14. Lee JH, Yonsei University, M.S. Thesis, 1996
  15. Lee SH, Park NK, Yoon SH, Chang WC, Lee TJ, Clean Technol., 15(4), 273, 2009
  16. Toyoda M, Murase H, Imai T, Naotsuka H, Kobayashi A, Takano K, Ohkuma K, IEEE Transactions on Power Delivery., 18, 442, 2003
  17. Cho WS, Soongsil University, M.S. Thesis, 2001
  18. Barrer RM, Coughlin B, Proceedings of the First International Conference on Zeolites, Society of Chemical Industry, London, 1968