Adsorption and desorption characteristics of CF4, which is considered a significant global warming compound, were experimentally investigated. Dynamic behavior of feed gas mixture of CF4 and N2 was observed by breakthrough curve. Effects of CF4 concentrations in the feed gas were investigated, and three pressurization methods were compared. Desorption experiments were carried out using vacuum blowdown and purge. Desorption curves with various N2 flow rates, feed compositions, and purge time were obtained. The enrichment factor was high for low concentration of CF4. However, the time required for complete desorption was independent of CF4 concentration. In the operation of separate vacuum blowdown and purge steps, a short period of vacuum blowdown followed by the purge step was effective.