A method for enhancing surface uniformity was investigated during the formation of titania film. A self-assembling technique with ultrasonic applications was effectively used to fabricate titania nanoparticles on the solid substrate after surface functionalization by APTES (3-amino-propyl-tri-ethoxy-silane). Morphological changes associated with structural evolution were observed by using AFM (atomic force microscopy). Results showed that ultrasonic weves were very effective in both enhancing the surface uniformity and narrowing the particle size distribution of the titania nanoparticles.