Korean Journal of Chemical Engineering, Vol.33, No.12, 3516-3522, 2016
Iron oxide grown by low-temperature atomic layer deposition
Atomic layer deposition (ALD) is a promising technology for fabricating conformal thin films of atomlevel thickness with chemical composition control over a variety of structures. This paper demonstrates the ALD of iron oxide thin films using a novel iron precursor, namely, bis[bis(trimethylsilyl)amide]iron [Fe(btmsa)2] and hydrogen peroxide as an oxygen source. The growth characteristics of iron oxide were investigated by varying the deposition temperatures from 100 to 225 °C, such that the ALD growth mode was observed at 150 to 175 °C with an average growth rate of 0.035±0.005 nm/cycle. The films deposited in ALD mode exhibited highly linear film thicknesses with the number of cycles and excellent conformality over high-aspect-ratio trenches. In addition, the deposited films were extremely pure and revealed a hematite phase without any subsequent heat treatment, even if the films were deposited at low temperatures.
[References]
Tamirat AG, Rick J, Dubale AA, Su WN, Hwang BJ, Nanoscale Horiz. , 1 (4), 243, 2016
Tartaj P, Morales MP, Gonzalez-Carreno T, Veintemillas-Verdaguer S, Serna CJ, Adv. Mater. , 23 (44), 5243, 2011
Hisatomi T, Dotan H, Stefik M, Sivula K, Rothschild A, Gratzel M, Mathews N, Adv. Mater. , 24 (20), 2699, 2012
Adegoke HI, AmooAdekola F, Fatoki OS, Ximba BJ, Korean J. Chem. Eng. , 31 (1), 142, 2014
Lu XH, Zeng YX, Yu MH, Zhai T, Liang CL, Xie SL, Balogun MS, Tong YX, Adv. Mater. , 26 (19), 3148, 2014
Siroky K, Jiresova J, Hudec L, Thin Solid Films , 245 (1-2), 211, 1994
Huo L, Li Q, Zhao H, Yu L, Gao S, Zhao J, Sens. Actuators B-Chem. , 107 (2), 915, 2005
Neri G, Bonavita A, Galvagno S, Li YX, Galatsis K, Wlodarski W, IEEE Sens. J. , 3 , 195, 2003
Duret A, Gratzel M, J. Phys. Chem. B , 109 (36), 17184, 2005
Cornuz M, Gratzel M, Sivula K, Chem. Vap. Deposition , 16 (10-12), 291, 2010
Carraro G, Gasparotto A, Maccato C, Bontempi E, Barreca D, Chem. Vap. Deposition , 21 (10-12), 291, 2005
Lin YJ, Xu Y, Mayer MT, Simpson ZI, McMahon G, Zhou S, Wang DW, J. Am. Chem. Soc. , 134 (12), 5508, 2012
Riha SC, Klahr BM, Tyo EC, Seifert S, Vajda S, Pellin MJ, Hamann TW, Martinson ABF, ACS Nano. , 7 (3), 2396, 2013
Zandi O, Klahr BM, Hamann TW, Energy Environ. Sci. , 6 (2), 634, 2013
George SM, Chem. Rev. , 110 (1), 111, 2010
Lim SH, Seo SW, Lee H, Chae H, Cho SM, Korean J. Chem. Eng. , 33 (6), 1971, 2016
Knez M, Niesch K, Niinisto L, Adv. Mater. , 19 (21), 3425, 2007
Miikkulainen V, Leskela M, Ritala M, Puurunen RL, J. Appl. Phys. , 113 , 021301, 2013
Scheffe JR, Frances A, King DM, Liang XH, Branch BA, Cavanagh AS, George SM, Weimer AW, Thin Solid Films , 517 (6), 1874, 2009
Martinson ABF, Devries MJ, Libera JA, Christensen ST, Hupp JT, Pellin MJ, Elam JW, J. Phys. Chem. C , 115 (10), 4333, 2011
Rooth M, Johansson A, Kukli K, Aarik J, Boman M, Harsta A, Chem. Vap. Deposition , 14 (3-4), 67, 2008
Riha SC, Racowski JM, Lanci MP, Klug JA, Hock AS, Martinson ABF, Langmuir , 29 (10), 3439, 2013
Klug JA, Becker NG, Riha SC, Martinson ABF, J. Mater. Chem. A , 1 , 11607, 2013
Lim BS, Rahtu A, Gordon RG, Nat. Mater. , 2 (11), 749, 2003
Avila JR, Kim DW, Rimoldi M, Farha OK, ACS Appl. Mater. Interfaces , 7 (30), 16138, 2015
Lie M, Fjellvag H, Kjekshus A, Thin Solid Films , 488 (1-2), 74, 2005
Bachmann J, Jing J, Knez M, Barth S, Shen H, Mathur S, Gosele U, Nielsch K, J. Am. Chem. Soc. , 129 (31), 9554, 2007
de Ridder M, van de Ven PC, van Welzenis RG, Brongersma HH, Helfensteyn S, Creemers C, Van Der Voort P, Baltes M, Mathieu M, Vansant EF, J. Phys. Chem. B , 106 (51), 13146, 2002
Andersen RA, Faegri K, Green JC, Haaland A, Lappert MF, Leung WP, Rypdal K, Inorg. Chem. , 27 (10), 1782, 1988
Libera JA, Hryn JN, Elam JW, Chem. Mater. , 23 (8), 2150, 2011
Hausmann DM, Gordon RG, J. Cryst. Growth , 249 (1-2), 251, 2003
Sambandam B, Surenjan A, Philip L, Pradeep T, ACS Sustainable Chem. Eng. , 3 (7), 1321, 2015
Karakalos S, Siokou A, Ladas S, Appl. Surf. Sci. , 255 (21), 8941, 2009
Kim DH, Kim JJ, Park JW, Kim JJ, J. Electrochem. Soc. , 143 (9), L188, 1999
McIntyre NS, Zetaruk DG, Anal. Chem. , 49 (11), 1521, 1977
Grosvenor AP, Kobe BA, Biesinger MC, McIntyre NS, Surf. Interface Anal. , 36 (12), 1564, 2004
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