| Issue |
| Total 1 articles [ 키워드: Silicon Films ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 12 (5), pp.572-575 (1995) EFFECT OF FLUORINE CHEMISTRY IN THE REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF SILICON FILMS FROM Si2H6-SiF4-H2 Kim DH, Lee IJ, Rhee SW, et al. |
