| Issue |
| Total 3 articles [ 키워드: Polysilicon ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 34 (6), pp.1793-1800 (2017) A new process of acidic hydrolysis of residual chlorosilane liquid for the preparation of silica and hydrochloric acid Cai J, Huang B, Ma Q, et al. |
| 2 |
Korean Journal of Chemical Engineering, 20 (6), pp.1138-1141 (2003) Nanometer-Sized Patterning of Polysilicon Thin Films by High Density Plasma Etching Using Cl2 and HBr Gases Song YS, Chung CW |
| 3 |
Korean Journal of Chemical Engineering, 12 (5), pp.572-575 (1995) EFFECT OF FLUORINE CHEMISTRY IN THE REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF SILICON FILMS FROM Si2H6-SiF4-H2 Kim DH, Lee IJ, Rhee SW, et al. |
