| Issue |
| Total 2 articles [ 키워드: Plasma Reactor ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 25 (4), pp.939-946 (2008) Effect of pulse modulation on particle growth during SiH4 plasma process Kim DJ, Kim KS |
| 2 |
Korean Journal of Chemical Engineering, 19 (3), pp.495-504 (2002) Rapid Growth of Particles by Coagulation Between Particles in Silane Plasma Reactor Kim DJ, Kim KS |
