Korean J. Chem. Eng.
Print:
ISSN 0256-1115
Online:
ISSN 1975-7220
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Issue
Total
2
articles [
키워드
:
Photoresist
]
No.
Article
1
Korean Journal of Chemical Engineering
,
27
(6), pp.1916-1921 (2010)
Effects of exposure wavelength and surface preparation conditions on the generation of blister defects in organic insulator layer
Cho M, Lee YB
2
Korean Journal of Chemical Engineering
,
16
(1), pp.96-103 (1999)
REMOVAL OF SURFACE CONTAMINANTS BY CRYOGENIC AEROSOL JETS
Yoon CN, Kim H, Kim SG, et al.
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