Issue
Total 2 articles [ 키워드: Photoresist ]
No. Article
1 Korean Journal of Chemical Engineering, 27 (6), pp.1916-1921 (2010)
Effects of exposure wavelength and surface preparation conditions on the generation of blister defects in organic insulator layer
Cho M, Lee YB
2 Korean Journal of Chemical Engineering, 16 (1), pp.96-103 (1999)
REMOVAL OF SURFACE CONTAMINANTS BY CRYOGENIC AEROSOL JETS
Yoon CN, Kim H, Kim SG, et al.