| Issue |
| Total 1 articles [ 키워드: Particle Coagulation ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 25 (4), pp.939-946 (2008) Effect of pulse modulation on particle growth during SiH4 plasma process Kim DJ, Kim KS |
| Print: | ISSN 0256-1115 |
| Online: | ISSN 1975-7220 |
|
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