| Issue |
| Total 1 articles [ 키워드: PIPVE ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 39 (1), pp.63-68 (2022) Plasma etching of SiO2 contact hole using perfluoropropyl vinyl ether and perfluoroisopropyl vinyl ether You SH, Kim JH, Kim CK |
| Print: | ISSN 0256-1115 |
| Online: | ISSN 1975-7220 |
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