| Issue |
| Total 1 articles [ 키워드: Magnetic Thin Films ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 21 (6), pp.1235-1239 (2004) Inductively Coupled Plasma Etching of Ta, Co, Fe, NiFe, NiFeCo, and MnNi with Cl2/Ar Discharges Park HJ, Ra HW, Song KS, et al. |
