| Issue |
| Total 1 articles [ 키워드: Highquality Thin Film ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 24 (1), pp.154-164 (2007) Numerical simulation on silane plasma chemistry in pulsed plasma process to prepare a-Si :H thin films Kim DJ, Kang JY, Nasonova A, et al. |
