| Issue |
| Total 2 articles [ 키워드: High Density Plasma Etching ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 20 (6), pp.1138-1141 (2003) Nanometer-Sized Patterning of Polysilicon Thin Films by High Density Plasma Etching Using Cl2 and HBr Gases Song YS, Chung CW |
| 2 |
Korean Journal of Chemical Engineering, 19 (3), pp.524-528 (2002) Inductively Coupled Plasma Etching of Pb(ZrxTi1- x)O3 Thin Films in Cl2/C2F6/Ar and HBr/Ar Plasmas Chung CW, Byun YH, Kim HI |
