| Issue |
| Total 1 articles [ 키워드: High Denisity Plasma ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 19 (2), pp.347-350 (2002) Heat Transfer between Wafer and Electrode in a High Density Plasma Etcher Im YH, Hahn YB |
| Print: | ISSN 0256-1115 |
| Online: | ISSN 1975-7220 |
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