| Issue |
| Total 2 articles [ 키워드: Etch Rate ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 28 (7), pp.1619-1624 (2011) Investigation of cleaning solution composed of citric acid and 5-aminotetrazole Kwon OJ, Bae JH, Cho BK, et al. |
| 2 |
Korean Journal of Chemical Engineering, 12 (2), pp.162-167 (1995) MECHANISM OF SILICON ETCHING IN HF-KMnO4-H2O SOLUTION Nahm KS, Seo YH |
