Korean J. Chem. Eng.
Print:
ISSN 0256-1115
Online:
ISSN 1975-7220
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Issue
Total
1
articles [
키워드
:
Endpoint Detection
]
No.
Article
1
Korean Journal of Chemical Engineering
,
25
(1), pp.13-18 (2008)
Multi-way principal component analysis for the endpoint detection of the metal etch process using the whole optical emission spectra
Han K, Park KJ, Chae H, et al.
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