Issue
Total 1 articles [ 키워드: Dimethylethylamine Alane ]
No. Article
1 Korean Journal of Chemical Engineering, 17 (4), pp.449-454 (2000)
Characteristics of Aluminum Films Prepared by Metalorganic Chemical Vapor Deposition Using Diemthylethylamine Alane on the Plasma-Pretreated TiN Surfaces
Kim DH, Kim BY