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Issue
Total 1 articles [ 키워드: Cl2/C2F6/Ar ]
No. Article
1 Korean Journal of Chemical Engineering, 19 (3), pp.524-528 (2002)
Inductively Coupled Plasma Etching of Pb(ZrxTi1- x)O3 Thin Films in Cl2/C2F6/Ar and HBr/Ar Plasmas
Chung CW, Byun YH, Kim HI