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Total 4 articles [ 키워드: Amorphous Carbon ] |
No. |
Article |
1 |
Korean Journal of Chemical Engineering, 40 (6), pp.1268-1276 (2023) Hydrogenated amorphous carbon films deposited using plasma enhanced chemical vapor deposition processes Jie Li, Heeyeop Chae |
2 |
Korean Journal of Chemical Engineering, 31 (10), pp.1892-1897 (2014) Electrical and optical characteristics of Ar plasma generated by low-frequency (60Hz) power source Kim HT, Kim CD, Pyo MS, et al. |
3 |
Korean Journal of Chemical Engineering, 23 (2), pp.325-328 (2006) Formation of nanodots and nanostripes of carbon nitride on silicon by plasmaand thermal treatments Kim SH, Hong JH, Hahn YB |
4 |
Korean Journal of Chemical Engineering, 22 (4), pp.639-642 (2005) Structural Properties of Amorphous Carbon Thin Films Deposited by LF (100 kHz), RF (13.56MHz), and Pulsed RF (13.56MHz) Plasma CVD Kim DS |
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