About The Journal
  Aims and Scope
  Editorial Board
  Submit a Manuscript 
  Subscription Information
  Guidelines for Publication
  Ethics
Articles & Issues
  Search
  Issue
  Online First
  KJChE on
For Authors
  Instructions to Authors
  Ethical Responsibilities of
  Authors in KJChE
  Ethics in Publishing
  Peer Review Process
  Author's Checklist
  Copyright Transfer Form
Contact us
 
 
 
Issue
Total 1 articles [ 저자: Yun HJ ]
No. Article
1 Korean Journal of Chemical Engineering, 24 (4), pp.670-673 (2007)
Comparison of atomic scale etching of poly-Si in inductively coupled Ar and He plasmas
Yun HJ, Kim TH, Shin CB, et al.