Issue
Total 2 articles [ 저자: Suh KY ]
No. Article
1 Korean Journal of Chemical Engineering, 25 (2), pp.373-376 (2008)
Reduction of proximity effect in electron beam lithography by deposition of a thin film of silicon dioxide
Seo CH, Suh KY
2 Korean Journal of Chemical Engineering, 23 (4), pp.678-682 (2006)
Fabrication of high aspect ratio nanostructures using capillary force lithography
Suh KY, Jeong HE, Park JW, et al.