Issue
Total 3 articles [ 저자: Seo ST ]
No. Article
1 Korean Journal of Chemical Engineering, 24 (6), pp.921-926 (2007)
Repetitive control of CATOFIN process
Seo ST, Won W, Lee KS, et al.
2 Korean Journal of Chemical Engineering, 23 (2), pp.199-202 (2006)
Run-to-run control of inductively coupled C2F6 plasma etching of SiO2: Multivariable controller design and numerical application
Seo ST, Lee KS, Yang DR
3 Korean Journal of Chemical Engineering, 22 (6), pp.822-829 (2005)
Run-to-Run Control of Inductively Coupled C2F6 Plasma Etching of SiO2: Construction of a Numerical Process with a Computational Fluid Dynamics Code
Seo ST, Lee YH, Lee KS, et al.