Issue
Total 1 articles [ 저자: Park MY ]
No. Article
1 Korean Journal of Chemical Engineering, 21 (6), pp.1256-1259 (2004)
Fourier Transform Infrared Spectroscopy Studies on Thermal Decomposition of Tetrakis-dimethyl-amido Zirconium for Chemical Vapor Deposition of ZrN
Kim IW, Kim SJ, Kim DH, et al.