| Issue |
| Total 1 articles [ 저자: Lee GR ] |
| No. | Article |
| 1 |
Korean Journal of Chemical Engineering, 20 (6), pp.1131-1133 (2003) Thickness of a Modified Surface Layer Formed in a Silsesquioxane-based Low-k Material During Etching in a Fluorocarbon Plasma Hwang SW, Lee GR, Min JH, et al. |
