Issue
Total 2 articles [ 저자: Ji SH ]
No. Article
1 Korean Journal of Chemical Engineering, 35 (12), pp.2474-2479 (2018)
Characteristics of NiO films prepared by atomic layer deposition using bis(ethylcyclopentadienyl)-Ni and O2 plasma
Ji SH, Jang WS, Son JW, et al.
2 Korean Journal of Chemical Engineering, 26 (6), pp.1453-1460 (2009)
Combined run-to-run and LQG control of a 12-inch RTP equipment
Won W, Yun W, Ji SH, et al.