Inductively coupled low temperature plasmas with oxygen, argon, mixture of oxygen and argon, and nitrogen have been used to modify polycarbonate(PC) films at the various process conditions. All plasma treatments generally had a tendency to increase the surface roughness of PC regardless of process conditions. The treatment of oxygen plasma showed the highest value in the surface roughness and mostly enhanced the generation of oxygen containing polar groups as much as 43% in comparison of untreated PC. The contact angle of untreated PC decreased from 82.31° to the lowest value of 9.17° after oxygen plasma treatment. The increase of RF delivered power had an effect on the rapid reduction of contact angle, but gas flow rates did not effect to reduce contact angles so much.