Recently, developments of process monitoring system in order to detect and diagnose process abnormalities has got the spotlight in process systems engineering. Normal data obtained from processes provide available information of process characteristics to be used for modeling, monitoring, and control. Since modern chemical and environmental processes have high dimensionality, strong correlation, severe dynamics and nonlinearity, it is not easy to analyze a process through model-based approach. To overcome limitations of model-based approach, lots of system engineers and academic researchers have focused on statistical approach combined with multivariable analysis such as principal component analysis (PCA), partial least squares (PLS), and so on. Several multivariate analysis methods have been modified to apply it to a chemical process with specific characteristics such as dynamics, nonlinearity, and so on. This paper discusses about missing value estimation and sensor fault identification based on process variable reconstruction using dynamic PCA and canonical variate analysis.