The microwave carbonization of rice chaff was performed, and their kinetics were compared to those of conventional thermal carbonization. Thermal carbonization was carried out at 300-600 oC for 30 minutes. The weight loss and C/H mole ratio remarkably increased as increase of temperature, while there was no carbonization by microwave dielectric heating in spite of increasing incident power and irradiation time. However, microwave carbonization was successfully performed by addition of 6 wt％ of thermal carbonized rice chaff, it’s C/H mole ratio is larger than 3.0, as a catalytic initiator to uncarbonized rice chaff, and the kinetics was depended on the incident power and irradiation time, resulting in the coincide with thermal carbonization to the Arrhenius equation. The activation energy of microwave carbonization was quite low as compared to that of thermal carbonization, while the kinetic constant was large. This is due to the internal volumetric heating characteristics of carbonized rice chaff by microwave. The effect of ash, and C/H mole ratio and amount of carbonized rice chaff were investigated on microwave carbonization.