Eu doped Y₂O₃ nanoparticles were prepared with the solvothermal synthesis using ethylenediamine solvent at 200 ℃ for 1-5 h and then annealed in air at from 1,000 ℃ to 1,400 for 2-4 h. The X-ray diffraction pattern of the crystals annealed at 1,000 ℃ for 2 h could be indexed as pure cubic cell of Y₂O₃ with the lattice parameter a=10.6029 Å which is very close to the reported value (JCPDS Card File 41-1105, a=10.6041 Å). Average sizes of prepared phosphor particles had about 100 nm, size and spherical morphology. The phosphor particle size decreased and the emission intensity increased as the annealing temperature increased. Through PL spectrum analysis, the 3% Eu doped Y_2-xO₃:Eu_x³⁺(x=0.06) phosphor showed the excitation spectrum at 250 nm wavelength and the maximum emission spectrum appeared at 611nm wavelength.