In this study, molecular dynamics simulations have been carried out to investigate the scattering properties of impacted ions on Cu(100) surfaces with the normal incident angle for various noble gas atoms including He, Ne, Ar, Kr and Xe. The initial kinetic energy of the projectile atoms was ranged from 100 eV to 1,600 eV. The simulation results are focused upon the scattering energy variations and the angle dependencies according to the incident energy and the projectile mass. For light atoms(He and Ne), the ratio of the scattered to the incident projectile energy was in a good agreement with the theoretical prediction based on the binary collision approximation. However, in the low energy regime, the scattering trajectories of heavy atoms(Ar, Kr and Xe) were characterized by the multiple collisions with the top and the second layer surfaces. With increasing the initial kinetic energy and the projectile mass, the scattering energy and the probability distribution were shown to be sharp and narrow. The angle dependencies of both longitudinal and azimuthal directions were not significant for light projectiles, while the longitudinal angle dependencies on the scattering distribution were indicated for heavy projectiles.