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HWAHAK KONGHAK,
Vol.34, No.4, 443-450, 1996
Vol.34, No.4, 443-450, 1996
CVI를 이용한 이염화이메틸규소로부터의 탄화규소 증착에 의한 화이버강화 세라믹 복합재료 제조의 연구
Studies on the Preparation of Fiber Reinforced Ceramic Composites by the Deposition of SiC from Dichloro- dimethylsilane through Chemical Vapor Infiltration
이염화이메틸규소와 수소로부터 화학증기침투(CVI)에 의해 옷감형 탄소 화이버프리폼에 탄화규소를 증착시켜 탄소/탄화규소 복합재료가 제조되었다. 이염화이메틸규소는 950℃ 이상의 온도에서는 거의 전부 열분해되었다. 증착속도는 압력, 즉 이염화이메틸규소의 농도가 증가할수록 증가하였다. 또한 증착온도가 올라갈수록 증가하다가 1000℃이상의 고온에서는 부반응에 의해 감소하였다. 탄화규소는 샘플 내부 화이버 주위에 고르게 증착되었으며 β-형임이 확인되었다. 이염화이메틸규소의 1차 증착 반응속도상수는 950℃에서 30cm/min이었고, 아레니우스 상수와 활성화에너지는 각각 1.58 X 1012cm/min와 60kcal/mol이었다.
C/SiC composite materials were prepared by depositing silicon carbide from di- chlorodimethylsilane(DDS) and hydrogen in the woven fabrics of carbon fibers through chemical vapor inviltration(CVI)). Most of DDS decomposed thermally at the temperature above 950℃. The deposition rate increased with the pressure, i.e., the concentration of di- chlorodimethylsilane. It also increased with the deposition temperature, however, it decreased after the temperature reached 1000℃ due to side reactions. Silicon carbide deposited uniformly around fibers in the sample and was confirmed as β-type. The firstorder deposition rate constant at 950℃ was 30 cm/min and the Arrhenius constant and the activation energy were 1.58 X 1012 cm/min 60 kcal/mol, respectively.
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[Cited By]
참고문헌정보(참고문헌, 인용문헌)는 화학공학소재연구정보센터에 의해 제공되고 있습니다.