The catalytic oxidative decomposition of CFC-113 was carried out on various metal oxides at atmospheric pressure, 500℃, and CFC-113 feed mole percent of 0.5 using a tubular flow reactor. Acid catalysts such as aluminas, zeolites, and titania-silica exhibited high decomposition activities, whereas the activities of Fe₂O₃, ZnO, TiO₂, SiO₂, and CaO were low. TiO₂-SiO₂ catalyst showed the best performance regarding retention of activity and high selectivity to CO₂ among the acid catalysts investigated. However, it was found that deac- tivation of catalyst occurred because Si in TiO₂-SiO₂(Ti/Si=50/50) reacted with inorganic ha- logens(fluorine and chlorine)which were reaction products. Solid superacid catalyst(TiO₂-SiO₂/ SO₄^2-:Ti/Si=50/50) modified with H₂SO₂ was prepared for high durability against inorganic ha- logens. The acid sites distribution of the catalyst was measured by DSC. The result sugge- sted that strong acid sites were active sites. This superacid catalyst showed the highest ac- tivity and durabitity among the catalysts examined.