Search / Korean Journal of Chemical Engineering
HWAHAK KONGHAK,
Vol.28, No.4, 430-437, 1990
산화주석 소결체의 가스검지에 관한 연구
A Study of Sintered SnO2 Pallets for Gas Detection
산화주석분말을 이용한 반도체형 가스검지소자를 제조하여 소결조거느 소자온도, 피검가스농도, 피검가스 종류 및 팔라듐촉매량의 변화에 따른 소자의 가스검지특성에 대하여 연구하였다. 전해주석을 원료로 하여 산처리를 한 다음 소성한 분말은 Cassiterite이었으며, 비표면적은 5-11m2/g이었다. 가스검지특성은 600℃에서 소결한 소자가 가장 우수하였고, 팔라듐촉매의 첨가는 소자의 가스감도를 증가시켰으며, 가스검지온도도 저하되었다. 산화주석의 가스검지기구는 산화주석분말의 표면에 흡착된 β종의 산소탈리에 기인하며, 가스감도는 피검가스의 농도와 촉매량이 증가할수록 증가하였다. 또한 SnO2의 가스검출 감도는 H2>C2H8>CH4 의 순서로 나타났다.
The effect of sensor temperature, sintering condition, gas concentration and the amount of Pd-catalyst on the gas sensitivities of semiconductor type SnO2-based gas sensor was studied. Calcined powder of electrolytic tin treated with heated nitric acid was cassiterite and its specific BET surface area was 5-11m2/g. The optimum sintering temperature was about 600℃. The effect of Pd addition resulted in the increase of its specific BET surface area and its gas sensitivities. The gas detection mechanism of SnO2 was the reaction of adsorbed gas with the β-species oxygen which was adsorbed at the surface of SnO2. The gas detection sensitivity of SnO2 was H2>C3H8>CH4.
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