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Search / Korean Journal of Chemical Engineering
Total 1 articles [ 키워드: Wet and Dry Cleaning ]
No. Article
1 HWAHAK KONGHAK, 38 (2), pp.230-235 (2000)
다결정 실리콘 식각 후처리에 대한 세정 효과 해석
The Cleaning Effect Analysis on Post Treatment of Polysilicon Etching
이창원, 이종대, 최상준, et al.