Korean Chem. Eng. Res.
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ISSN 0304-128X
Online:
ISSN 2233-9558
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Search / Korean Journal of Chemical Engineering
Total
1
articles [
키워드
:
Remote Plasma Oxidation
]
No.
Article
1
Korean Chemical Engineering Research
,
46
(2), pp.408-413 (2008)
저압급속열산화법과 플라즈마확산산화법에 의한 실리콘 산화박막의 제조
Fabrication of Ultrathin Silicon Oxide Layer by Low Pressure Rapid Thermal Oxidation and Remote Plasma Oxidation
고천광, 이원규
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