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Search / Korean Journal of Chemical Engineering
Total 2 articles [ 키워드: Rapid Thermal Processing ]
No. Article
1 Korean Chemical Engineering Research, 46 (3), pp.486-491 (2008)
상업용 12인치 급속가열장치의 제어계 설계를 위한 모델인식
Model Identification for Control System Design of a Commercial 12-inch Rapid Thermal Processor
윤우현, 지상현, 나병철, et al.
2 HWAHAK KONGHAK, 37 (2), pp.304-312 (1999)
Q-ILC를 이용한 고속 열처리 공정의 온도 제어
Temperature Control in Rapid Thermal Processing Using Q-lLC
정영석, 최진훈, 이광순