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Search / Korean Journal of Chemical Engineering
Total 1 articles [ 키워드: Multilevel Metallization ]
No. Article
1 HWAHAK KONGHAK, 39 (5), pp.573-578 (2001)
다층금속배선공정 중 세정 공정에서 발생하는 텅스텐 부식
Tungsten Corrosion during Wet Cleaning Process in Multilevel Metallization
신강섭, 이원규