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Search / Korean Journal of Chemical Engineering
Total 1 articles [ 키워드: Moisture Adsorption ]
No. Article
1 Korean Chemical Engineering Research, 53 (3), pp.401-406 (2015)
실리콘 표면에 증착된 다공성 알루미나의 수분 흡착 거동
Moisture Gettering by Porous Alumina Films on Textured Silicon Wafer
임효령, 엄누시아, 조정호, et al.