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Search / Korean Journal of Chemical Engineering
Total 1 articles [ 키워드: Metal Interconnection ]
No. Article
1 Korean Chemical Engineering Research, 52 (1), pp.26-39 (2014)
반도체 소자용 구리 배선 형성을 위한 전해 도금
Electrodeposition for the Fabrication of Copper Interconnection in Semiconductor Devices
김명준, 김재정