Korean Chem. Eng. Res.
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ISSN 0304-128X
Online:
ISSN 2233-9558
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Search / Korean Journal of Chemical Engineering
Total
1
articles [
키워드
:
MEMS Fabrication
]
No.
Article
1
Korean Chemical Engineering Research
,
44
(5), pp.513-519 (2006)
마이크로 칩 전기영동에 응용하기 위한 다결정 실리콘 층이 형성된 마이크로 채널의 MEMS 가공 제작
MEMS Fabrication of Microchannel with Poly-Si Layer for Application to Microchip Electrophoresis
김태하, 김다영, 전명석, et al.
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