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Search / Korean Journal of Chemical Engineering
Total 1 articles [ 키워드: Loading Position ]
No. Article
1 Korean Chemical Engineering Research, 44 (5), pp.483-488 (2006)
Remote 플라즈마에서 위치 및 반응기체에 따른 PMMA의 식각 특성 분석
Influence of Loading Position and Reaction Gas on Etching Characteristics of PMMA in a Remote Plasma System
고천광, 이원규