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Search / Korean Journal of Chemical Engineering
Total 1 articles [ 키워드: Hard Mask ]
No. Article
1 Korean Chemical Engineering Research, 46 (4), pp.676-680 (2008)
rf 마그네트론 스퍼링에 의하여 증착된 TiN 박막의 물성에 대한 증착변수의 영향
Effect of Deposition Parameters on the Properties of TiN Thin Films Deposited by rf Magnetron Sputtering
이도영, 정지원