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Search / Korean Journal of Chemical Engineering
Total 1 articles [ 키워드: Electron Cyclotron ]
No. Article
1 HWAHAK KONGHAK, 35 (3), pp.374-379 (1997)
ECR플라즈마를 이용한 화학증착법에 의해 제조된 실리콘 산화막의 특성
Characteristics of Silicon Oxide Films Prepared by Chemical Vapor Deposition Using ECR Plasma Source
전법주, 오인환, 임태훈, et al.