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Search / Korean Journal of Chemical Engineering
Total 2 articles [ 키워드: Cleanliness ]
No. Article
1 Korean Chemical Engineering Research, 47 (6), pp.688-694 (2009)
전자·반도체용 스프레이 분사형 세정제에 대한 청정도 평가
Cleanliness Test by Spray-Type Cleaning Agent for Electronic and Semiconductor Equipment
허효정, 노경호
2 HWAHAK KONGHAK, 39 (6), pp.715-720 (2001)
ESCA를 이용한 웨이퍼의 세정도 측정
Measurement of Cleanliness of Wafer by ESCA
이광진, 정용안, 노경호