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Search / Korean Journal of Chemical Engineering
Total 1 articles [ 키워드: Atomic Layer Epitaxy ]
No. Article
1 HWAHAK KONGHAK, 37 (4), pp.615-617 (1999)
TiO2 박막의 원자층성장에 관한 연구
A Study on Atomic Layer Growth of TiO2 Thin Films
부진효, 조성민