Korean Chem. Eng. Res.
Print:
ISSN 0304-128X
Online:
ISSN 2233-9558
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Search / Korean Journal of Chemical Engineering
Total
1
articles [
저자
:
이창원
]
No.
Article
1
HWAHAK KONGHAK
,
38
(2), pp.230-235 (2000)
다결정 실리콘 식각 후처리에 대한 세정 효과 해석
The Cleaning Effect Analysis on Post Treatment of Polysilicon Etching
이창원
, 이종대, 최상준, et al.
Search