Korean Chem. Eng. Res.
Print:
ISSN 0304-128X
Online:
ISSN 2233-9558
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Search / Korean Journal of Chemical Engineering
Total
1
articles [
저자
:
윤종호
]
No.
Article
1
HWAHAK KONGHAK
,
32
(2), pp.121-132 (1994)
저압화학증착공정에성의 텅스텐 박막의 층덮힘에 관한 실험 및 이론적 연구
Experimental and Theoretical Study of Step Coverage in LPCVD of Tungsten
박상규,
윤종호
, 이시우
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