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Search / Korean Journal of Chemical Engineering
Total 1 articles [ 저자: 윤민희 ]
No. Article
1 HWAHAK KONGHAK, 31 (3), pp.255-262 (1993)
ECR plasma 식각장치에서 CF4에 의한 Si의 식각반응에 관한 연구
The etching reaction of silicon with CF4 in ECR plasma etching system
윤민희, 김종배, 남기석, et al.